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1

An Electrical and Physical Study of Crystal Damage in High-Dose Al- and N-Implanted 4H-SiC

Fisher, Craig A., Esteve, Romain, Doering, Stefan, Roesner, Michael, de Biasio, Martin, Kraft, Martin, Schustereder, Werner, Rupp, Roland

Journal:

Materials Science Forum

Year:

2017

Language:

english

File:

PDF, 1.15 MB

english, 2017

2

Metastable Defects in Proton Implanted and Annealed Silicon

Jelinek, Moriz, Laven, Johannes G., Ganagona, Naveen, Job, Reinhart, Schustereder, Werner, Schulze, Hans Joachim, Rommel, Mathias, Frey, Lothar

Journal:

Solid State Phenomena

Year:

2015

Language:

english

File:

PDF, 377 KB

english, 2015

3

Defect engineering for modern power devices

Reinhart Job, Johannes G. Laven, Franz-Josef Niedernostheide, Hans-Joachim Schulze, Holger Schulze, Werner Schustereder

Journal:

physica status solidi (a)

Year:

2012

Language:

english

File:

PDF, 977 KB

english, 2012

4

Defect Investigations via Positron Annihilation Spectroscopy on Proton Implanted Silicon

Schriefl, Andreas J., Sgouridis, Sokratis, Schustereder, Werner, Puff, Werner

Journal:

Solid State Phenomena

Year:

2011

Language:

english

File:

PDF, 307 KB

english, 2011

5

Depletion of superjunction power MOSFETs visualized by electron beam induced current and voltage contrast measurements

Kirnstoetter, Stefan, Faccinelli, Martin, Jelinek, Moriz, Schustereder, Werner, Laven, Johannes G., Schulze, Hans-Joachim, Hadley, Peter

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 1.03 MB

english, 2014

6

High Density Amorphous Ice from Cubic Ice

Thomas Loerting, Ingrid Kohl, Werner Schustereder, Katrin Winkel, Erwin Mayer

Journal:

Year:

2006

Language:

english

File:

PDF, 99 KB

english, 2006

7

High dose proton implantations into silicon: a combined EBIC, SRP and TEM study

Kirnstoetter, Stefan, Faccinelli, Martin, Gspan, Christian, Grogger, Werner, Jelinek, Moriz, Schustereder, Werner, Laven, Johannes G., Schulze, Hans-Joachim, Hadley, Peter

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 1.69 MB

english, 2014

8

(Invited) Challenges for Ion Implantation in Power Device Processing

Schustereder, Werner

Journal:

ECS Transactions

Year:

2017

Language:

english

File:

PDF, 2.22 MB

english, 2017

9

The Efficiency of Hydrogen-Doping as a Function of Implantation Temperature

Jelinek, Moriz, Laven, Johannes G., Ganagona, Naveen, Schustereder, Werner, Schulze, Hans Joachim, Rommel, Mathias, Frey, Lothar

Journal:

Solid State Phenomena

Year:

2015

Language:

english

File:

PDF, 1.54 MB

english, 2015

10

[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Medium Energy High Dose Ion Implanter

Gori, Brian, Chang, Shengwu, Leavitt, Bill, Timberlake, Dave, Kruger, Christian, Schustereder, Werner, Welsch, Marie, Klein, Jeff, Decker-Lucke, Kurt

Year:

2016

Language:

english

File:

PDF, 618 KB

english, 2016

11

Cover Picture: High Density Amorphous Ice from Cubic Ice (ChemPhysChem 6/2006)

Thomas Loerting, Ingrid Kohl, Werner Schustereder, Katrin Winkel, Erwin Mayer

Journal:

Year:

2006

File:

PDF, 34 KB

2006

12

An EBIC and SRP study on thermal donors in proton implanted p-type magnetic Czochralski silicon

Faccinelli, Martin, Kirnstoetter, Stefan, Schustereder, Werner, Laven, Johannes G., Hadley, Peter

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 611 KB

english, 2014

13

[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - A Novel Method for Simultaneous on Wafer Level Monitoring of Ion Implantation Energy and Dose

Jelinek, Moriz, Lugger, Mario, Siedl, Nicolas, Schustereder, Werner, Krueger, Christian, Wagner, Mathias

Year:

2016

Language:

english

File:

PDF, 261 KB

english, 2016

14

Alternative Highly Homogenous Drift Layer Doping for 650 V SiC Devices

Rupp, Roland, Schustereder, Werner, Höechbauer, Tobias, Kern, Ronny, Rüb, Michael, Csato, Constantin, Krippendorf, Florian, Akhmadaliev, Shavkat, von Borany, Johannes

Journal:

Materials Science Forum

Year:

2016

Language:

english

File:

PDF, 874 KB

english, 2016

15

Amorphous Ice: Stepwise Formation of Very-High-Density Amorphous Ice from Low-Density Amorphous Ice at 125 K

Loerting, Thomas, Schustereder, Werner, Winkel, Katrin, Salzmann, Christoph G., Kohl, Ingrid, Mayer, Erwin

Journal:

Physical Review Letters

Year:

2006

Language:

english

File:

PDF, 557 KB

english, 2006

16

[IEEE 2016 21st International Conference on Ion Implantation Technology (IIT) - Tainan, Taiwan (2016.9.26-2016.9.30)] 2016 21st International Conference on Ion Implantation Technology (IIT) - Power Device Implants

Schustereder, Werner

Year:

2016

Language:

english

File:

PDF, 574 KB

english, 2016

17

AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Radiation protection for high energy implantation of light ions in a production environment

Kroener, Friedrich, Schustereder, Werner, Fuchs, Dieter

Year:

2012

Language:

english

File:

PDF, 1.24 MB

english, 2012

18

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - The Impact of Helium Co-Implantation on Hydrogen Induced Donor Profiles in Float Zone Silicon

Laven, Johannes, Job, Reinhart, Schulze, Hans-Joachim, Niedernostheide, Franz-Josef, Häublein, Volker, Schulze, Holger, Schustereder, Werner, Ryssel, Heiner, Frey, Lothar

Year:

2010

Language:

english

File:

PDF, 1.30 MB

english, 2010

19

Multiple Proton Implantations into Silicon: A Combined EBIC and SRP Study

Kirnstötter, Stefan, Faccinelli, Martin, Jelinek, Moriz, Schustereder, Werner, Laven, Johannes G., Schulze, Hans Joachim, Hadley, Peter

Journal:

Solid State Phenomena

Year:

2013

Language:

english

File:

PDF, 745 KB

english, 2013

20

Conversion Efficiency of Radiation Damage Profiles into Hydrogen-Related Donor Profiles

Laven, Johannes G., Job, Reinhard, Schustereder, Werner, Schulze, Hans Joachim, Niedernostheide, Franz Josef, Schulze, Holger, Frey, Lothar

Journal:

Solid State Phenomena

Year:

2011

Language:

english

File:

PDF, 1.03 MB

english, 2011

21

Electrically detected magnetic resonance study on defects in Si pn-junctions created by proton implantation

Gruber, Gernot, Kirnstoetter, Stefan, Hadley, Peter, Koch, Markus, Aichinger, Thomas, Schulze, Holger, Schustereder, Werner

Journal:

Physica status solidi

Year:

2014

Language:

english

File:

PDF, 593 KB

english, 2014

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